Thickness Measurement by Model-Based Exhaustive Analysis in Far-Infrared - IMT Mines Alès Accéder directement au contenu
Article Dans Une Revue Infrared Physics and Technology Année : 2021

Thickness Measurement by Model-Based Exhaustive Analysis in Far-Infrared

Morgan Fouque
  • Fonction : Auteur
  • PersonId : 1096620
Olivier Strauss

Résumé

We propose a method for reconstructing the thickness variation of one layer of interest inside a multi-layered structure. This reconstruction is based on inverting far-infrared reflection measurements at a few distinct frequencies. This real-time method allows non-destructive evaluation of a multi-layered structure to better control its manufacturing process, whereas other methods have acquisition or computation times that are not compatible with real-time non-destructive evaluation. Two simulated data and one real data based experiments revealed that the method we propose is robust against measurement noise.
Fichier principal
Vignette du fichier
S1350449521001146.pdf (1.24 Mo) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-03203750 , version 1 (24-05-2023)

Licence

Paternité - Pas d'utilisation commerciale

Identifiants

Citer

Morgan Fouque, Nicolas Sutton-Charani, Olivier Strauss. Thickness Measurement by Model-Based Exhaustive Analysis in Far-Infrared. Infrared Physics and Technology, 2021, 116, pp.103742. ⟨10.1016/j.infrared.2021.103742⟩. ⟨hal-03203750⟩
156 Consultations
8 Téléchargements

Altmetric

Partager

Gmail Facebook Twitter LinkedIn More