Thickness Measurement by Model-Based Exhaustive Analysis in Far-Infrared
Abstract
We propose a method for reconstructing the thickness variation of one layer of interest inside a multi-layered structure. This reconstruction is based on inverting far-infrared reflection measurements at a few distinct frequencies. This real-time method allows non-destructive evaluation of a multi-layered structure to better control its manufacturing process, whereas other methods have acquisition or computation times that are not compatible with real-time non-destructive evaluation. Two simulated data and one real data based experiments revealed that the method we propose is robust against measurement noise.
Domains
Engineering Sciences [physics]Origin | Files produced by the author(s) |
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